Microsystem including a stopping device

摘要

The system (2) has a ferromagnetic membrane (20) mounted on a substrate (3) and with an electrical contact (21). The membrane is moved between an open position and a closed position of an electrical circuit, where the open position is delimited by a stop device arranged near a rotational axis (P) of the membrane. The stop device has metal detection electrodes (4a, 4b) contacting the membrane in open position for passing an electric current into an electrical detection circuit. The detection circuit detects whether the membrane is in the open position.