SUSCEPTOR AND VAPOR GROWTH DEVICE,申请号EP20040720191-传众专利搜索

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发明名称	SUSCEPTOR AND VAPOR GROWTH DEVICE
摘要
申请公布号	EP1615259(A4)	申请公布日期	2007.08.15
申请号	EP20040720191	申请日期	2004.03.12
申请人	SHIN-ETSU HANDOTAI CO., LTD	发明人	KANAYA, KOICHI;OTSUKA, TORU;OSE, HIROKI
分类号	H01L21/68;C23C16/458;C30B25/12;H01L21/205;H01L21/683;H01L21/687	主分类号	H01L21/68
代理机构		代理人
主权项
地址

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