发明名称 Method for testing pixels for LCD TFT displays
摘要 The present invention provides a method of electron beam testing of liquid crystal displays comprising non-uniform electrodes having a conductive portion and a dielectric portion. In accordance with methods of the present invention, the diameter of the electron beam is increased so that the beam is less focused, i.e., enlarged or "blurred," over a non-uniform electrode area. The diameter of the beam is increased so that the beam generates secondary electrons from the conductive portion of the non-uniform electrode area. The configured test beam may be circular, elliptical, or other suitable shapes.
申请公布号 US7256606(B2) 申请公布日期 2007.08.14
申请号 US20040977510 申请日期 2004.10.29
申请人 APPLIED MATERIALS, INC. 发明人 WENZEL AXEL;SCHMID RALF;BRUNNER MATTHIAS
分类号 G01R31/00;G01R31/307 主分类号 G01R31/00
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