发明名称 Method of dividing a substrate into a plurality of individual chip parts
摘要 The present invention relates to a method for dividing a substrate into a number of individual chip parts, comprising the steps of: forming a number of chip parts in the substrate, comprising, for each chip part, of arranging recesses in the substrate for containing fluid; arranging one or more breaking grooves in the substrate along individual chip parts; applying mechanical force to the substrate to break the substrate along the breaking grooves. The invention also relates to a substrate as well as a chip part.
申请公布号 US7256106(B2) 申请公布日期 2007.08.14
申请号 US20050499292 申请日期 2005.02.04
申请人 MICRONIT MICROFLUIDICS B.V. 发明人 VAN'T OEVER RONNY
分类号 H01L21/00;B81C1/00;H01L21/30;H01L21/301;H01L21/46 主分类号 H01L21/00
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