| 摘要 |
A cable guide of a semiconductor fabricating apparatus is provided to prevent a peripheral device from being interfered by electromagnetic wave of a cable by making a cable guide include a sub part which receives a support part functioning to guide the cable and the rest of the cable not supported by the support part. A part of a cable(20) is supported by a support part(11). A sub part(12) is connected to one or both ends of the support part so that the other part of the cable is received lower than the support part in the sup part. The support part and the sub part include a shield wall so that the cable placed in the support part and the sub part doesn't interfere a peripheral apparatus adjacent to the cable. The support part, the sub part and the shield wall can be made of conductive materials. The sub part has a plurality of connection portions capable of rotating.
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