发明名称 Solid-state image pickup device
摘要 A solid-state image pickup device 10 has an arrangement in which a second conductivity type semiconductor region 14 is formed on the surface of a first conductivity type electric charge accumulation region 13 of a light-receiving sensor portion, a shallow trench isolation layer 20 formed of an insulating layer is buried into a trench formed on a semiconductor substrate 11 , the shallow trench isolation layer 20 is composed of an upper wide portion 21 and a lower narrow portion 22 and a second conductivity type semiconductor region 23 is formed around the lower narrow portion 22 of the shallow trench isolation layer 20 . The solid-state image pickup device can suppress the occurrence of a dark current and a white spot, it can produce an image with high image quality and it can sufficiently maintain a sufficiently large amount of electric charges that can be handled by the light-receiving sensor portion.
申请公布号 US7256469(B2) 申请公布日期 2007.08.14
申请号 US20040015140 申请日期 2004.12.17
申请人 SONY CORPORATION 发明人 KANBE HIDEO
分类号 H01L27/146;H01L31/06;H01L27/14;H01L27/148;H01L31/00;H01L31/10;H04N5/335;H04N5/361;H04N5/367;H04N5/369;H04N5/374 主分类号 H01L27/146
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