| 摘要 |
A coating and developing apparatus, a coating and developing method and a storage medium with a computer-readable program are provided to restrain a protective layer from being peeled off a substrate by improving the adhesiveness of the protective layer using an adhesiveness improving unit capable of supplying an adhesiveness improving fluid. A coating and developing apparatus includes a first peripheral corner cleaning unit, a coating unit and an adhesiveness improving unit. The first peripheral corner cleaning unit is used for removing a peripheral corner portion of resist layer by using a predetermined solvent. The coating unit is used for forming a protective layer on the resist layer by using a coating solution containing a water repellent material. The adhesiveness improving unit(8) is used for supplying an adhesiveness improving fluid onto an exposed surface of a substrate in order to improve the adhesiveness of the protective layer. |
