发明名称 TEST DEVICE FOR SEMICONDUCTOR CHIP
摘要 A test apparatus of a semiconductor chip is provided to perform a reliability test and an acceleration lifetime test under various conditions in spite of the use of a single apparatus by controlling a supply cycle of power source and the amount of output load. A test apparatus of a semiconductor chip includes a semiconductor chip fixing unit, an input/output load controlling unit and a test result display unit. The semiconductor chip fixing unit(100) is used for fixing at least one semiconductor chip sample. The input/output load controlling unit(200) is used for supplying variable test conditions to the semiconductor chip sample by determining an operation cycle of the semiconductor chip sample according to the selection of a user and an output load of the semiconductor chip sample. The test result display unit(600) is used for transforming the output voltage or output current of the semiconductor chip sample according to the test conditions of the input/output load controlling unit into user recognizable data.
申请公布号 KR100750568(B1) 申请公布日期 2007.08.13
申请号 KR20060106345 申请日期 2006.10.31
申请人 IUCF-HYU (INDUSTRY-UNIVERSITY COOPERATION FOUNDATION HANYANG UNIVERSITY) 发明人 CHANG, SEOG WEON;KIM, JAE JUNG
分类号 H01L21/66 主分类号 H01L21/66
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