| 摘要 |
A measuring apparatus correctly measures the purity, mixing ratio, and the like of an insulative (nonconductive) fluid such as ultrapure water flowing through a passage. The apparatus includes first to third sensors ( 19, 21, 23 ) to detect capacitance changes on the passage ( 1 a) covered with an insulating resin pipe, a memory ( 41 ) to store reference capacitance changes, and a controller ( 35 ) to compare the detected capacitance changes with the stored reference capacitance changes, measure a purity of the insulative fluid flowing through the passage, and control the purity of the insulative fluid. |
