METHOD FOR DETECTING BAD PROCESS

摘要

A method for detecting process failure is provided to prevent the generation of process failure by analyzing automatically measurement data using the reference data stored in a database of a host. A database is formed according to process conditions on a reference substrate and failure type of the reference substrate(S10). The thickness and temperature distribution of a thin film of a substrate are measured by using measurement equipment(S20). Whether process failure exists or not is determined by comparing comparative data supplied from the measurement equipment with the reference data stored in the database(S30). The database contains the reference data such as a thin film thickness and a temperature distribution of the reference substrate.