摘要 |
A method for manufacturing an LCD(Liquid Crystal Display) is provided to simplify the manufacturing process of a fringe field switching type LCD, by using a slit mask and a lift-off process in the manufacturing process. In a first-mask process, a common electrode(101) and a gate electrode(102) are formed by depositing a first conductive layer and a first metal layer on a substrate(100) and pattern-etching the layers. In a second-mask process, a thin film transistor is formed by depositing an insulating layer(104), an active layer, an ohmic layer, and a second metal layer on the resultant substrate and pattern-etching the layers. In a third-mask process, a pixel electrode(120) is formed by forming a passivation layer(108) on the resultant substrate, forming a contact hole in the passivation layer, depositing a second conductive layer on the passivation layer, and performing a lift-off process.
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