LOADPORT OF SEMICONDUCTOR DEVICE FABRICATION APPARATUS

摘要

A loadport of a semiconductor fabricating apparatus is provided to prevent a FOUP(front end unified pod) from being dropped from a stage or being arbitrarily lifted up by firmly fixing a FOUP to a transfer table by a clamp of a locking member. A frame(110) is mounted on one side of process equipment, having an opening. A support table(120) is extended in one direction of the frame. A wafer transfer receptacle is placed on a stage capable of transferring back and forth in the direction of the frame in the support table. The wafer transfer receptacle is clamped by a locking member(130) to be prevented from being dropped from the stage or being arbitrarily lifted up. The locking member can protrude from the upper surface of the stage, including a clamp(132) inserted into a locking groove formed on the lower surface of the wafer transfer receptacle.