摘要 |
PROBLEM TO BE SOLVED: To provide a microscope capable of high-speed observation detailedly concerning a structure lighting microscope having ultra-resolution. SOLUTION: A diffraction grating 51 is composed of SLM, and has no drive part moving the diffraction grating 51. Since each pixel of SLM is transparent, opaque, and further changes transparency, it is used as a transmission diffraction grating by using it and forming a grating pattern. Since each pixel is two-dimensionally arranged in vertical and horizontal directions, for instance, the grating pattern of a vertical streak pattern is formed, and a spatial phase of the grating pattern is changed by moving the position of a grating line in a lateral direction. The direction of the grating line is formed to some extent in an arbitrary direction, and the position of the grating line is moved in a direction orthogonal to the direction of the grating line. COPYRIGHT: (C)2007,JPO&INPIT
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