发明名称 ANALYSIS DEVICE AND METHOD
摘要 PROBLEM TO BE SOLVED: To analyze the causes of failure in a semiconductor device, more efficiently. SOLUTION: An analysis device 30 is provided, which analyzes the result of the testing of a plurality of devices under test, having the same configuration by a testing device. The analysis device 30 comprises an acquisition section 300 for acquiring a determination result obtained by comparing a value, where data stored at a plurality of flip-flops provided at the device under test, while being connected by a scan chain by performing the scanning test of the device under test are read for each flip-flop, with an expectation value; a result storage section 310 for storing the determination result of each flip-flop, corresponding to the position in a scan chain; a compositing section 350 for generating a composition result which represents the composition of the determination results of the flip-flop of each device under test for each position in the scan chain; and a display section 360 for displaying the combined result. COPYRIGHT: (C)2007,JPO&INPIT
申请公布号 JP2007198856(A) 申请公布日期 2007.08.09
申请号 JP20060016794 申请日期 2006.01.25
申请人 ADVANTEST CORP 发明人 SHINOHARA MAKOTO;NAGANO KATSUSHI
分类号 G01R31/28;H01L21/66 主分类号 G01R31/28
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