| 摘要 |
PROBLEM TO BE SOLVED: To provide an XY stage capable of reducing friction when moving a movable table, when the movable table is moved on a base. SOLUTION: This XY stage S is provided with the base 1, the movable table 5 provided opposedly to the the base 1 to be moved, and the first moving means 3 for moving the movable table 5 along an X-axial direction of the movable table 5, the second moving means 4 for moving the movable table 5 along a Y-axial direction of the movable table 5, wherein the Y-axial direction is a direction orthogonal to the X-axial direction, and a friction reducing means 6 for reducing the friction between the movable table 5 and the base 1 when the movable table 5 is moved on the base 1, in a side faced to the base 1 of the movable table 5. COPYRIGHT: (C)2007,JPO&INPIT |
