| 摘要 |
A wafer spinner apparatus includes a main body, and a plurality of spin units disposed in the main body to open and close in a rack configuration, each spin unit including a stepping motor disposed in the main body to move a spin unit in a horizontal direction, a base plate coupled to the stepping motor, a reference sensor disposed in the main body to determine a position deviation of the spin unit, and a spin chuck disposed on the base plate.
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