| 摘要 |
The carrier ( 10 ) for double-side polishing has a base material 10 a the material of which is stainless steel (SUS) , for example, as is before, and the base material 10 a is coated with a coating layer 10 b of a material having a hardness higher than that of the base material 10 a. The coating layer 10 b is desirably coated uniformly without variations in thickness and not warped easily, and the material for the coating layer 10 b of the double-side polishing carrier 10 is desirably any one selected from diamond-like carbon, a nitride film, a sapphire film and a titanium nitride film. For production of the double-side polishing carrier 10 , a double-side polishing carrier 10 ' having been used for polishing is prepared first. The used carrier 10 ' is coated with the coating layer 10 b. The invention can suppress the progress of abrasion of the double-side polishing carrier, and can provide satisfactory thickness accuracy, film thickness distribution accuracy, and surface roughness.
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