| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide a method for retrieving bare board information when an inspection object does not have a normal inspection mode, and measuring the three-dimensional shape of a target object of a board through bare board learning when a board is supplied from a supplier having no bare board information. <P>SOLUTION: This method is constituted of stages for: measuring brightness of the first illumination source; measuring a factor acquired by converting a phase into a height; measuring the three-dimensional shape of the board by the normal inspection mode; executing bare board learning when having no bare board information; measuring the three-dimensional shape of the target object of the board by a learning inspection mode when the bare board information is acquired or when bare board learning information is generated; and analyzing whether the board is normal or not by using three-dimensional shape information. Hereby, a three-dimensional shape measuring work of the target object of the board can be executed easily. <P>COPYRIGHT: (C)2007,JPO&INPIT |
