发明名称 |
Micromechanical motion sensor |
摘要 |
A micromechanical motion sensor is capable of detecting a deflection imparted to an oscillatably mounted bar spring element excited to a permanent periodic oscillation by an electrostatic oscillating drive to which a periodic drive voltage is applied. To compensate non-linearities of the resonance frequency response of the bar spring element, a sum of a normal drive voltage signal and a compensation drive signal may be applied to a comb drive. In an alternative embodiment, separate compensation comb drive units may be additionally provided to the comb drive units used for the oscillation drive and a compensation voltage signal may be applied to them to compensate for the non-linearity.
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申请公布号 |
US2007180907(A1) |
申请公布日期 |
2007.08.09 |
申请号 |
US20040556172 |
申请日期 |
2004.03.24 |
申请人 |
KRIEG DIETMAR;GOMEZ UDO-MARTIN;NEUL REINHARD |
发明人 |
KRIEG DIETMAR;GOMEZ UDO-MARTIN;NEUL REINHARD |
分类号 |
G01C19/02;G01C19/56;G01C25/00;G01P21/00 |
主分类号 |
G01C19/02 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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