| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide a method which certainly fixes a member to be treated (substrate) on a tray in plasma treatment and before/after it to elevate treatability and operativity, and can easily strip the substrate from the tray when necessary; and to provide its apparatus. <P>SOLUTION: The plasma treatment method, which mounts the substrate positioned on the tray on a supporting bed to treat the surface of the substrate by plasma, bonds the substrate to the tray with a heat-strippable adhesive member. A foam strippable sheet can be preferably used as a heat-strippable adhesive member. As the heat strippable adhesive member usually has adhesion, the tray and the substrate are exactly fixed before/after plasma, and a good operativity can be obtained, moreover, after treatment, the substrate is easily stripped from the tray only heating the tray higher than a predetermined stripping temperature. <P>COPYRIGHT: (C)2007,JPO&INPIT |
