摘要 |
PROBLEM TO BE SOLVED: To provide an alumina film depositing method capable of easily depositing an alumina film on a base material such as gold or the like, and controlling the thickness of the alumina film. SOLUTION: The alumina film depositing method comprises a first step of depositing a self-organization monomolecular layer 2 by orientating molecules having a carboxylic group on an end with respect to a surface of a base material 1 by the self-organization method, a second step of fixing boehmite particles 3 on the self-organization monomolecular layer 2, and a third step of depositing an alumina film 4 by heating and calcining the base material 1 on which the self-organization monomolecular layer 2 with the boehmite particles 3 fixed thereto is deposited. COPYRIGHT: (C)2007,JPO&INPIT
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