发明名称 DIE ATTACHING METHOD
摘要 A die attaching method for attaching semiconductor dies on wafers, each wafer having a first center point and a first radius may comprise expanding a wafer carrier tape so that the wafer has a second center point and a second radius, measuring the second center point and second radius of the wafer, adding the difference between the first radius and the second radius to a first coordinate value of a first die to calculate a second coordinate value of the first die, and picking up and attaching the semiconductor dies consecutively from the first die. Calculating the second coordinate value of the first die may include compensating the first center point of the wafer based on the second center point of the wafer to calculate the positional coordinate of the semiconductor dies including the first die.
申请公布号 US2007184564(A1) 申请公布日期 2007.08.09
申请号 US20060552416 申请日期 2006.10.24
申请人 SAMSUNG ELECTRONICS CO., LTD. 发明人 KIM DAE-YOUNG;OH JOUNG-MIN
分类号 H01L21/66 主分类号 H01L21/66
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