发明名称 Probe card and probe device
摘要 The probe card is configured such that the outline of the probe card is formed almost round shape and a plurality of connectors for being electrically connected with a tester are provided on the upper surface thereof along the outline. A substrate with many probes arranged thereon is provided on the bottom surface of the probe card. The substrate and the connectors are connected with one another via a flexible print wiring board.
申请公布号 US2007182431(A1) 申请公布日期 2007.08.09
申请号 US20070701379 申请日期 2007.02.02
申请人 TOKYO ELECTRON LIMITED 发明人 KOMATSU SHIGEKAZU;AMEMIYA TAKASHI;MOCHIZUKI JUN
分类号 G01R31/02 主分类号 G01R31/02
代理机构 代理人
主权项
地址