Process parameter e.g. humidity, measuring device for use in process- and automation technology, has sensor units that are arranged on top of each other, and are manufactured by planar technology such as thin and/or thick film technologies

摘要

The device has two sensor units (1, 2) arranged on top of each other in planes, where the planes are arranged parallel to each other. The sensor units are manufactured by a planar technology such as thin-film technology and/or thick-film technology and/or a printing technology. An intermediate layer (4) is arranged between the sensor units, where one of the sensor units (1) is a temperature sensor or heat sensor, and the other sensor unit (2) is a humidity sensor or thermal flow sensor.