| 摘要 |
<p>A substrate exchanging apparatus is provided in which a first substrate received from a first transporter is transferred to a second transporter and a second substrate received from the second transporter is transferred to the first transporter. The substrate exchanging apparatus comprises the second transporter that can move forward and backward in the direction perpendicular to a stacking direction of the first and second substrates, a support member that can move relatively to the second transporter in the stacking direction of the substrates, a first holding member that can hold one of the first and second substrates and is provided on the support member, and a second holding member that can hold the other one of the first and second substrates and is provided on the support member, apart from the first holding member with a certain distance in the stacking direction of the substrates. When one of the first and second holding members is used for receiving the first substrate from the first transporter, the supporting member and the second transporter are relatively moved so that the other one of the first and second holding members is used for the first transporter receiving the second substrate.</p> |
