ULTRASONIC PROBE

摘要

PROBLEM TO BE SOLVED: To provide a ultrasonic probe which prevents damage to a silicon substrate due to temperature variation while reducing noise due reflected waves and is excellent in transmission/reception performance and structure reliability. SOLUTION: The ultrasonic probe 2 is equipped with: a first substrate 20 having the silicon substrate 21 and a ultrasonic transmitting/receiving element 3; an acoustic lens 11 installed on the upper surface of the first substrate 20; a damping layer 41 installed beneath the first substrate 20; and a second substrate 31 installed between the lower surface of the first substrate 20 and the upper surface of the damping layer 41. The second substrate 31 is formed from material having a coefficient of linear expansion and acoustic impedance which are approximately the same as those of the silicon substrate 21 of the first substrate 20. COPYRIGHT: (C)2007,JPO&INPIT