| 摘要 |
PROBLEM TO BE SOLVED: To provide a semiconductor inspection system capable of achieving high-accuracy inspection and a semiconductor device. SOLUTION: Sense lines SL11, SL12 wired to a sense terminal of a tester and force lines FL11, FL12 wired to a force terminal of the tester are provided on a test board, for example. Electrode pads PD1s, PD2s for sense lines and electrode pads PD1f, PD2f for force lines are provided on a semiconductor device (LSI) to be a device to be inspected, where the PD1s and PD1f, and PD2s and PD2f are each connected on the LSI, and the FL11 and SL11 from a current supply unit PS1 are individually connected to the PD1f and PD1s, respectively, and the FL12 and SL12 from a current supply unit PS2 are individually connected to the PD2f and PD2s, respectively. According to such a constitution, sensing can be performed at a part of the electrode pads. COPYRIGHT: (C)2007,JPO&INPIT
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