| 摘要 |
<P>PROBLEM TO BE SOLVED: To enhance precision and sensitivity of acceleration sensors and to attempt size reduction of acceleration sensors. <P>SOLUTION: The acceleration sensor 1 comprises to include a base 2 with an XY substrate plane parallel to an XY plane, a beam section 4 of a frame shape, arranged in floating state over the XY substrate plane of the base 2, a beam section supportively fixing section, supporting the beam section 4 in center impeller beam to the base 2 via the support sections 5a and 5b, a spindle section 7 (7a and 7b), arranged in floating state over the XY substrate plane of the base 2, and a conjunction section 8, supporting the spindle section 7 (7a and 7b) in the shape of a cantilever beam to the beam section 4. The spindle section 7 is constructed displaceable with respect the three axial directions of X-axis, Y-axis, and Z-axis, depending on the bending deformation of the beam section 4 of frame shape. The beam section 4 is equipped with an X-axis acceleration detecting section for detecting acceleration, based on the bending deformation of the beam section 4, caused by displacement of the spindle section 7 due to the X-axial acceleration; a Y-axis acceleration detecting section detecting acceleration, based on the bending deformation of the beam section 4, caused by displacement of the spindle section 7 due to the Y-axis acceleration; and a Z-axis acceleration detecting section detecting acceleration, based on the bending deformation of the beam section 4, caused by the displacement of the spindle section 7 due to the Z-axis acceleration. <P>COPYRIGHT: (C)2007,JPO&INPIT |
