发明名称 METHOD AND INSTRUMENT FOR MEASURING CHARACTERISTIC OF FET
摘要 PROBLEM TO BE SOLVED: To dispense with a terminal element for enhancing measuring precision, in an instrument for measuring a characteristic of an FET by imparting a pulse to a gate. SOLUTION: This instrument of generating the pulse imparted to the gate G of the FET 500, and for measuring the characteristic of the FET 500 by measuring a voltage dependent on a drain current flowing in the FET 500 in response to the pulse, is provided with a pulse generator 210 for generating the pulse, a directional element 230 arranged in a post stage of the pulse generator 210, and a voltage measuring means 250 for measuring the voltage. COPYRIGHT: (C)2007,JPO&INPIT
申请公布号 JP2007198836(A) 申请公布日期 2007.08.09
申请号 JP20060016275 申请日期 2006.01.25
申请人 AGILENT TECHNOL INC 发明人 UTADA KAZUHISA
分类号 G01R31/26;H01L29/78;H01L29/786 主分类号 G01R31/26
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