LIGHT SOURCE DEVICE, SUBSTRATE TREATING DEVICE, AND SUBSTRATE TREATING METHOD

摘要

A light source device is formed by a plasma formation chamber including a plasma formation region where plasma is formed by electrodeless discharge to generate light and an optical window defining the lower end of the plasma region in the plasma formation chamber and transmitting the light. A micro wave transmitting window is formed in the plasma chamber for introducing a micro wave for generating the plasma. Furthermore, outside of the micro wave transmitting window, a micro wave antenna is connected to the micro wave window for introducing the micro wave.