| 摘要 |
PROBLEM TO BE SOLVED: To provide a surface inspection technique, capable of measuring presence or absence and configuration of irregularities with high accuracy, in addition to a vast range at one time with simple apparatus composition. SOLUTION: The surface inspection device including a first step irradiating illumination light to a measured domain from an oblique direction and an optical axis, consisting with incident direction of illumination light to the measured domain is an object side telecentric optical system 310 or an image side telecentric optical system establishing an object-side aperture angle to a point in the measured domain at a predetermined angle and is equipped with a second step focusing reflected light in the measured domain; a third step collecting brightness data at each point in the measured domain by imaging the focused images; and a fourth step determining presence or absence and configuration of irregularities in the measured domain, by processing brightness data and recognizing bright sections and dark sections. COPYRIGHT: (C)2007,JPO&INPIT
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