| 摘要 |
PROBLEM TO BE SOLVED: To provide a capacitance type pressure sensor excelling in the linearity of capacitance change with respect to pressure and exhibiting less variation among sensor individuals. SOLUTION: A fixed electrode 3 is formed on a silicon substrate 1 via an insulating layer 2. The fixed electrode 3 comprises a plurality of comb teeth 3a extending in the direction of the normal to a principal plane of the silicon substrate 1 and a storage area 3b with a projection part of a movable electrode insertable thereinto. The movable electrode 6 is provided on the fixed electrode 3 via insulating layers 4 and 5. The movable electrode 6 comprises a plurality of comb teeth 6a projecting on the fixed electrode 3 side. The movable electrode 6 is vertically displaced by pressure to cause the comb teeth 6a to be inserted into the area 3b between the comb teeth 3a of the fixed electrode 3. This changes a confrontation area between the movable electrode 6 and the fixed electrode 3. That is, a change in capacitance is a rectilinear change since S in an expression C=εS/d changes in proportion to pressure. COPYRIGHT: (C)2007,JPO&INPIT
|
