摘要 |
A non-volatile memory device and method of fabricating same are disclosed. The memory device comprises; a gate insulating film formed on a semiconductor substrate, a floating gate completely covering the gate insulating film, the floating gate comprising a conductive film pattern and a conductive spacer formed at one side of the conductive film pattern, a tunnel insulating film formed on a portion of the conductive film pattern, the conductive spacer, and extending laterally outward over a portion of the semiconductor substrate adjacent the conductive spacer, a control gate formed on the tunnel insulating film, a first impurity region formed within the semiconductor substrate proximate one side of the conductive film pattern opposite the conductive spacer, and a second impurity region formed within the semiconductor substrate proximate one side of the control gate disposed laterally outward from the floating gate.
|