发明名称 Non-volatile memory device and method of fabricating the same
摘要 A non-volatile memory device and method of fabricating same are disclosed. The memory device comprises; a gate insulating film formed on a semiconductor substrate, a floating gate completely covering the gate insulating film, the floating gate comprising a conductive film pattern and a conductive spacer formed at one side of the conductive film pattern, a tunnel insulating film formed on a portion of the conductive film pattern, the conductive spacer, and extending laterally outward over a portion of the semiconductor substrate adjacent the conductive spacer, a control gate formed on the tunnel insulating film, a first impurity region formed within the semiconductor substrate proximate one side of the conductive film pattern opposite the conductive spacer, and a second impurity region formed within the semiconductor substrate proximate one side of the control gate disposed laterally outward from the floating gate.
申请公布号 US2007181914(A1) 申请公布日期 2007.08.09
申请号 US20070654637 申请日期 2007.01.18
申请人 UOM JUNG-SUP;PARK HYUNG-MOO;NOH JAE-YOON;PARK DUK-SEO;CHUNG JIN-KUK 发明人 UOM JUNG-SUP;PARK HYUNG-MOO;NOH JAE-YOON;PARK DUK-SEO;CHUNG JIN-KUK
分类号 H01L29/76;H01L29/745 主分类号 H01L29/76
代理机构 代理人
主权项
地址