| 摘要 |
A chemical filter unit includes a housing, a first filter for filtering liquid chemicals, a second filter for filtering air, and a window in the housing. The housing has an outlet and an inlet through which chemicals enter and leave the filter, respectively, and an air vent that allows air to be discharged from the filter. The first filter is disposed in a path along which chemicals flow inside the housing to filter out particles contained in the chemicals, and the second filter is disposed in a path along which air leaves the filter through the air vent. The second filter includes a medium that collects particles contained in the air. The window allows the second filter to be seen from outside the housing.
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