| 摘要 |
<p><P>PROBLEM TO BE SOLVED: To provide a laser machining apparatus that can adjust a laser beam into various shapes matching to a complicated shape of defect, and can easily and efficiently irradiate the laser beam, which is shaped into the designated shape while eliminating influence from diffraction laser light, onto defective points of an object to be repaired such as a color filter for liquid crystal display and a TFT substrate. <P>SOLUTION: The laser machining apparatus comprises a laser oscillator 2, a beam shaping means 3 to shape the laser beam outputted by the laser oscillator 2, and a laser beam optical system 4 to irradiate the laser beam shaped by the beam shaping means 3 to the object. The laser beam shaping means 3 has a plurality of mirrors arranged in a matrix form whose angle can be individually controlled. The laser beam optical system 4 is equipped with a relay lens unit 4a and an objective lens unit 4b. <P>COPYRIGHT: (C)2007,JPO&INPIT</p> |
