| 摘要 |
PROBLEM TO BE SOLVED: To provide a sample drift correcting device capable of obtaining an observation picture having high resolution by preventing a motion from becoming fuzzy due to drift of a sample, an image forming optical system provided with the device, and a sample drift correcting method. SOLUTION: This sample drift correcting device is mounted to an image forming optical system which irradiates the sample with light or an electron beam to form an image on an image reception area by focusing the light or the electron beam passing through the sample, and photographs the image, and is equipped with an operation part to obtain the observation picture of the sample by computing a moving vector in one video frame picture or between one video frame picture and a reference video frame picture from the continuous video frame picture of the image, and by integrating each video frame picture after applying correction for the amount of movement to each video frame picture, and a control part to irradiate the sample with light or an electron beam within a short time of 1/10,000 to 1/3 of one video frame period in synchronization with the one video frame period by a photographing means. COPYRIGHT: (C)2007,JPO&INPIT
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