| 摘要 |
PROBLEM TO BE SOLVED: To provide an electron microscope and control method of the same capable of obtaining a reflected electron-image depending on structure of a sample and crystal orientation with high sensitivity regardless of dip angle of the sample. SOLUTION: The electron microscope 100 has a sample stage 11 on which the sample 8 is mounted, capable of changing a dip angle of an observation face 8a of the sample 8. The observation face 8a of the sample 8 is scanned by a converged electron beam, and electron 9 reflected from the sample 8 is detected by a reflected electron detector. A sample stage driving part 12 drives the sample stage 11 and makes the observation face 8a of the sample 8 slant by the control of a drive control part 16. A reflected electron detector driving part 17 drives a reflected electron detector 10 in compliance with the dip angle of the sample stage 11 by the control of the drive control part 16, and makes a detection face 10a of the reflected electron detector 10 slant so as to become parallel with the observation face 8a of the sample 8. COPYRIGHT: (C)2007,JPO&INPIT
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