Substrate edge part cleaning apparatus and substrate edge part cleaning method

摘要

A substrate edge part cleaning apparatus that judges cleaning degree of each glass substrate when cleaning the edge part of the glass substrate used for liquid crystal display. The substrate edge part cleaning apparatus 100 has a cleaning head which cleans by wiping an edge part of a substrate for display A while moving rectilinearly, the apparatus including a camera 117 which captures images of the proximity of an edge of a color filter which is placed on the substrate, by moving together with the cleaning head. The camera 117 obtains surface status information of the substrate part which has been cleaned, and the substrate edge part cleaning apparatus 100 further includes a cleaning degree judgment unit 306 which judges cleaning degree based on the surface status information.