发明名称 |
Method and apparatus for controlling sample position during material removal or addition |
摘要 |
A method and system includes the accurate positioning of a sample in a multi-axis range of motion. In a preferred embodiment, the present invention enables this movement by combining coarse and fine motion stages. By using a combination of stages and precise measuring means, normal and typical errors are significantly reduced.
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申请公布号 |
US2007181545(A1) |
申请公布日期 |
2007.08.09 |
申请号 |
US20060347575 |
申请日期 |
2006.02.06 |
申请人 |
BOYETTE JAMES E;LECLAIRE JEFFREY E;WHITE ROY |
发明人 |
BOYETTE JAMES E.;LECLAIRE JEFFREY E.;WHITE ROY |
分类号 |
B23K26/08 |
主分类号 |
B23K26/08 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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