ONE BODY TYPE GUN STRUCTURE FOR USE IN SEMICONDUCTOR DEVICE FABRICATION EQUIPMENT

摘要

A one piece type gun structure for using in semiconductor device manufacturing equipment is provided to improve working efficiency in a cleaning process and to select freely a working place. A one piece type gun structure includes an air gun part, a lamp light part and a storage tube. The air gun part(40) sprays the air to a nozzle tip(42) in response to the laxity of a trigger. The air gun part has a coupling portion(25). The lamp light part is mounted on the coupling portion of the air gun part in order to generate a predetermined light with a constant wavelength. The storage tube(46) is connected to a lower end portion of the air gun part. The storage tube stores an air hose(47) necessary for the air gun part and a power source line(12) necessary for the lamp light part.