| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide a method for conditioning a surface of a grinding pad capable of enhancing the grinding force on the grinding pad and obtaining the consistent grinding force by using a grinding wheel and realizing the consistent surface conditioning state with less dispersion in the finish surface roughness of a work to be ground. <P>SOLUTION: In a grinding device for grinding a work to be ground by a grinding pad, a carrier for the work having a hole part for holding the work is held between a lower platen and an upper platen via each grinding pad, the work is held in a hole of the carrier, and both platens and the grinding pad and the carrier integrated therewith are respectively rotated. Loose abrasive is fed to the grinding pad to grind the work by the grinding pad. A grinding wheel for conditioning the pad surface for conditioning the surface of the grinding pad consists of a synthetic resin having the Rockwell hardness (HRS) of -50 to -120. <P>COPYRIGHT: (C)2007,JPO&INPIT |
