| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide an inertial force sensor capable of detecting a plurality of inertia forces different from each another, such as angular velocity and acceleration, detecting an inertia force on a plurality of detection axes, and achieving compactness of various types of electronic apparatuses. <P>SOLUTION: The inertial force sensor is provided with a detection element 1 for detecting inertial forces. The detection element 1 comprises four driving arms 2; a support part 4 for supporting one end parts of the driving arms 2; and two fixing arms 6 to be connected to the support part 4 and fixed to a mounting substrate. One fixing arm 6 is arranged between two driving arms 2, and the other fixing arm 6 is arranged between the other two driving arms 2. <P>COPYRIGHT: (C)2007,JPO&INPIT |
