| 摘要 |
PROBLEM TO BE SOLVED: To provide a spin coater and coating method in which yield is improved by preventing mist from sneaking to a rear side of a substrate. SOLUTION: A spin coater comprises a rotary table 20 which is provided to freely rotate towards the inside of one surface, and a holding means 30 for holding a substrate 1 spaced from the one surface at a predetermined interval through a spacer 22 circumferentially provided at a predetermined interval on the one surface of the rotary table 20. Furthermore, a blowing means 40 is provided for blowing gases from the center side of the substrate 1 towards an outer circumferential side, between the rotary table 20 and the substrate 1. COPYRIGHT: (C)2007,JPO&INPIT
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