| 摘要 |
PROBLEM TO BE SOLVED: To provide a method and a device capable of inspecting a shape error from a design value of a component or a product in various manufacturing industries, easily and highly accurately in the noncontact state, by enabling measurement of a surface shape error of an inspection object. SOLUTION: When the surface shape of the inspection object has no error to a design value, a projection lattice designed beforehand so that a projected deformed lattice image becomes linear is projected by a projector onto the object surface having an actual error, and the acquired deformed lattice image is analyzed. Hereby, even in the case of an object having a step or a groove or having a steep undulation, the surface shape error of an actual measuring object having an error can be measured and inspected highly accurately in the noncontact state by determining easily the order of the deformed lattice, and by preventing the line width of the deformed lattice from being widened and preventing brightness of the deformed lattice image from being weakened. COPYRIGHT: (C)2007,JPO&INPIT
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