| 摘要 |
<p>A plasma generating apparatus is provided. The apparatus includes a first cylindrical electrode having a hollow therein, a dielectric provided on an inner face of the first electrode, a second cylindrical electrode spaced in the hollow of the first electrode to a distance from an inner face of the dielectric with a plurality of spacers, a gas supply unit supplying source gas to the space between the second electrode and the dielectric, a voltage applying unit applying a voltage to the first and second electrodes, a plasma discharging port discharging plasma generated in the space between the second electrode and the dielectric to the outside, and covers shielding both ends of the first electrode to prevent the source gas from leaking, so that the electrodes are easily cooled, and the plasma is generated by the simple structure thereof.</p> |
