| 摘要 |
<p><P>PROBLEM TO BE SOLVED: To provide a chemical filter unit effectively used for the treatment of a chemical substance, and to provide an effective air conditioning system using the chemical filter unit. <P>SOLUTION: This chemical filter unit 15 is constituted by placing a chemical filter 17 in a casing 16, and disposed at a desired place in a clean room and the like. A flow channel 22 for treated air is formed from a bottom toward a top in the casing, the chemical filter is placed on the way of the flow channel, an openable check door 23 is disposed on the front face of the casing, an inflow port 18 communicated with an underfloor chamber 8 is formed on the bottom of the casing, and an outflow port 20 connectable with a return duct is formed on the top. In this air conditioning system, a plurality of the chemical filter units are dispersively placed at desired places in the clean room, and return air from the clean room is circulated in a state of being returned to an air conditioner through the chemical filter unit. <P>COPYRIGHT: (C)2007,JPO&INPIT</p> |
