MEASURING DATA CONTROL METHOD, MEASURING DATA STRUCTURE, SPECTRUM REGENERATING METHOD AND SURFACE ANALYZER

摘要

PROBLEM TO BE SOLVED: To provide a control method of measuring data capable of collectively measuring EDS spectra at once. SOLUTION: A wave height analyzer 26 is constituted so as to convert the energy sensed by an EDS detector 21 to pulses of the heights corresponding to the energy to distribute the height distribution of the heights of the pulses to measure the number of pulses at every channel. A data processing circuit 27 sends a data block which consists of the combination of a tag showing the energy data of X rays 20 and an energy value to a CPU 28. The CPU 28 continuously preserves the sent data block in a hard disk 29. COPYRIGHT: (C)2007,JPO&INPIT