摘要 |
PROBLEM TO BE SOLVED: To provide a pressure amplifying device capable of switching to an appropriate operating point. SOLUTION: The pressure amplifying device has chambers in which a moving body for moving in a valve main body and the valve main body are separated by a diaphragm and provides an output fluid pressure for which supply gas supplied to a supply pressure chamber and a bias chamber is amplified in a feedback chamber and an output pressure chamber according to change in input fluid pressure applied to an input pressure chamber. The pressure amplifying device consists of a bias pressure supply device connected to the bias chamber for supplying a predetermined pressure equal to or lower than the supply pressure to the bias chamber, a gain switch chamber pressure supply device, which is connected to a gain switch chamber provided between the bias chamber and the input pressure chamber, for supplying a predetermined pressure equal to or lower than the supply pressure to the gain switch chamber. COPYRIGHT: (C)2007,JPO&INPIT
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