| 摘要 |
PROBLEM TO BE SOLVED: To provide a diaphragm pump enabling to fix a diaphragm and a partition member easily without causing variation of pump characteristic, with keeping sufficient sealing performance. SOLUTION: A resin diaphragm 31, a metal diaphragm 32 and an actuator 30 which is a joined body of piezoelectric elements 33 are arranged on both sides of a partition plate 10, and a space between each actuator 30 and the partition plate 10 is divided as pump chambers 34 to construct a diaphragm pump of "two actuators: two pump chambers". A delivery side communication path 14b and a suction side communication path 14a communicating with each pump chamber 34 are formed on the partition plate 10, and a delivery flow path 15b and a suction flow path 15a extending from the communication paths 14a, 14b in a side surface direction are penetrated and formed. A sealing part 41 not interfering with each flow path 15a, 15b is formed around the pump chamber 34 by laser-welding the resin diaphragm 31 on the partition plate 10 to secure sealing performance and make joining condition constant. COPYRIGHT: (C)2007,JPO&INPIT
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