| 摘要 |
PROBLEM TO BE SOLVED: To provide a mirror finishing device for a doughnut-like substrate where at least either the inner circumferential string face or the outer circumferential string face in a doughnut-like substrate can be uniformly mirror-finished without unevenness, and to provide a method therefor. SOLUTION: A relatively rotary motion is applied among a doughnut-like substrate 1 and heating heads 15, 25, further, heat is applied to at least either the inner circumferential string face 1a of a circular hole and the outer circumferential string face 1b of the doughnut-like substrate 1 via the heating heads 15, 25, and a molten layer is formed on at least either the inner circumferential string face 1a of the circular hole and the outer circumferential string face 1b of the doughnut-like substrate 1, so as to perform mirror finishing. COPYRIGHT: (C)2007,JPO&INPIT
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